Micro Electro Mechanical Systems (MEMS) are the highly miniature device or an array of devices combining electrical and mechanical components that is fabricated using IC batch processing. MEMS are manufactured by processes namely crystal growing, wafer preparation, film deposition, oxidation, lithography, etching. In MEMS, a wide variety of transduction mechanisms can be used to convert real world signals from one form of energy to another, thereby enabling many different micro sensors, micro actuators and micro systems. Due to inherent advantages of batch fabrication technique, integrability, ,these systems have wide scope of application. MEMS transducers improve automotive control system and amends safety (case study). MEMS can improve performance, but at the price of higher development costs, greater complexity and a longer development time.
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